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We summarized The present advancement status on the higher-electrical power DUV laser the two on the wavelength of FHG on the one-μm laser and at 193 nm. The modern improvement with the strong-point out/fiber laser, along with the nonlinear optical crystals, prompts don't just the typical energy but will also the beam good quality (coherence) of your DUV lasers to an unprecedented stage.
全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。
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LBO is additionally an excellent nonlinear crystal which is usually placed on the SHG in the NIR for the environmentally friendly. The DUV laser is generally understood by two phases of SFG from the LBO crystals because there isn't any stage-matching angle for LBO to convert the eco-friendly laser at 515 nm or 532 nm towards the DUV immediately by SHG [16]. Not long ago, the NSBBF crystal has also demonstrated its likely to get a higher conversion efficiency from 532 nm to 266 nm. The walk-off angle and deff of your NSBBF are Pretty much comparable to All those of CLBO [17].
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Also, combining the strong-condition laser with other nonlinear process including stimulated Raman scattering, NIR lasers may very well be accomplished at new wavelengths with substantial ability and high beam quality, which was tested through the proof-of-theory experiment. This Raman laser scheme presents a new route to the high-energy DUV laser, Specifically on the wavelength of 193 nm.
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